Optical phased array, method for preparing optical phased array and phase-shifting control system
AssigneeUnited Microelectronics Center Co., Ltd
InventorsLi Jin, Ping Jiang, Youxi Lu, Jianzhong Han, Jin Guo, Junbo Feng, Zuwen Liu, Rui Cao, Qixin Liu, Beibei Wu, Mijie Yang, Tonghui Li
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