Multi-layer high-efficiency dielectric grating with improved manufacturability

Abstract

Systems and methods are provided for multi-layer high-efficiency dielectric grating with improved manufacturability. An example diffraction grating based morphology includes a plurality of grating lines; a plurality of intermediate layers; and a substrate bearing both of the plurality of grating lines and the plurality of intermediate layers; where one or more of the plurality of grating lines include a plurality of grating layers; and where at least two of the plurality of grating layers include different refractive index (RI) material. The plurality of grating layers includes one or more layers having low refractive index (RI) material and one or more layers having high refractive index (RI) material. The plurality of intermediate layers includes a plurality of matching layers and a plurality of dielectric layers.

Dependencies are inferred from the claim text.