System and method for performing characterization of a sample
AssigneeOnto Innovation Inc.
InventorsManjusha Mehendale, George Andrew Antonelli, Robin A. Mair, Priya Mukundhan
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AssigneeOnto Innovation Inc.
InventorsManjusha Mehendale, George Andrew Antonelli, Robin A. Mair, Priya Mukundhan
Estimating the term…
An optical metrology device includes a selectable pump arm that is used to produce a transient response in the target sample and a probe arm and may be configured to perform static Magneto-Optic Kerr Effect (MOKE) measurements or ellipsometry measurements when the pump arm is not selected, and time resolved (TR) MOKE measurements or ellipsometry measurements when the pump arm is selected. The optical metrology device may be further configured to perform opto-acoustic measurements when the pump arm is selected. A pulse shaper in the pump arm may be used to modify the pulse duration, phase, or both, of the incident pump beam to enable measurement of the dependence of the magnetic dynamics on the pump pulse characteristics. The optical metrology device may be configured to operate at a single selectable wavelength or multiple wavelengths in a continuous or discontinuous spectrum.
An apparatus for measuring at least one property including a magnetic property of a target sample using at least one of time-resolved magneto-optical Kerr effect (MOKE) measurements, ellipsometry measurements, or a combination thereof, the apparatus comprising:
A method for measuring at least one property including a magnetic property of a target sample using at least one of time-resolved magneto-optical Kerr effect (MOKE) measurements, ellipsometry measurements, or a combination thereof, the method comprising:
An apparatus for measuring at least one property including a magnetic property of a target sample using at least one of time-resolved magneto-optical Kerr effect (MOKE) measurements, ellipsometry measurements, or a combination thereof, the apparatus comprising:
Dependencies are inferred from the claim text.