Systems and methods for carving probed metrology
AssigneeArizona Board of Regents on behalf of Arizona State University
InventorUmberto Celano
Life of this patent
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Abstract
An apparatus includes a body and a plurality of members extending from the apparatus configured to form carvings with different geometries along 2D layered semiconductor material. The apparatus includes conductive pins positioned along the plurality of members that accommodate individual sensing of current-voltage characteristics per carving. The carvings can include small stripes and the apparatus can probe the electrical resistance of the small stripes of 2D layered semiconductors where the geometry defines strong current confinement, thus enabling the rapid extraction of sheet resistance for rapid comparison between material quality.
Claims19
An apparatus for rapid qualification of electrical properties in semiconductors, comprising:
- a body configured to engage a substrate;
- a plurality of members extending from the body, the plurality of members including a first side in communication with the body and a second side opposite the first side defining a free end, each of the plurality of members defining a different respective geometric shape configuration;
- a plurality of punching tips, each of the plurality of members defining a respective one of the plurality of punching tips along the free end and configured to form carving shapes corresponding to the respective geometric shape configuration;
- a plurality of conductive pins, each of the plurality of members including a respective one of the plurality of conductive pins positioned relative to the body in accordance with the respective geometric shape configuration;
- and
- at least one conductive layer configured to electrically connect the plurality of conductive pins with a current meter to test at least one electrical property of the substrate.
An apparatus, comprising:
- a body;
- a plurality of members extending from the body, the plurality of members including a first side in communication with the body and a second side opposite the first side defining a free end, each of the plurality of members defining a different respective geometric shape configuration;
- a plurality of punching tips, each of the plurality of members defining a respective one of the plurality of punching tips along the free end and configured to form carving shapes corresponding to the respective geometric shape configuration;
- a plurality of conductive pins, each of the plurality of members including a respective one of the plurality of conductive pins positioned relative to the body in accordance with the respective geometric shape configuration;
- and
- at least one conductive layer configured to electrically connect the plurality of conductive pins with a current meter.
Dependencies are inferred from the claim text.