Ray scanning apparatus
AssigneesNuctech Company Limited, Tsinghua University
InventorsZhiqiang Chen, Li Zhang, Qingping Huang, Yong Zhou, Zhenhua Zhao, Hui Ding, Xin Jin, Chao Ji
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Abstract
Embodiments of the present application provides a ray scanning apparatus, which includes: a conveying device for conveying an object under inspection to pass through a scanning region of the ray scanning apparatus; a ray source assembly including a plurality of ray source modules, each of the ray source modules including at least one ray source point emitting a ray beam; and a detector assembly for detecting rays transmitting through the object under inspection during scanning and including a plurality of detector sets.
Claims18
A ray scanning apparatus, comprising:
- a conveying device, for conveying an object under inspection to pass through a scanning area of the ray scanning apparatus;
- a ray source assembly, comprising a plurality of ray source modules, each ray source module comprising at least one ray source point emitting a ray beam, and the plurality of ray source modules being arranged around the scanning area from three sides in a U-shape with an opening toward a left or right side of the scanning area and fixed in a plane perpendicular to a conveying direction of the object under inspection;
- and
- a detector assembly, for detecting rays transmitting through the object under inspection during scanning and comprising a plurality of detector sets, end portions of the plurality of detector sets being connected to each other to surround the scanning area, and the plurality of detector sets being fixed in a plane perpendicular to the conveying direction of the object under inspection,
- wherein the detector assembly is located between the ray source assembly and the scanning area in a direction perpendicular to the conveying direction of the object under inspection, the ray source assembly and the detector assembly are arranged to at least partially overlap in the conveying direction of the object under inspection, and the plurality of ray source modules can be mounted and detached independently of each other,
- wherein each ray source module comprises a separate chamber to accommodate a respective ray generating device, and the chamber of each ray source module includes a separate vacuum chamber for accommodating a plurality of target spots, and
- wherein the separate chamber of each ray source module is provided with a mounting-positioning structure, which is adapted for mounting and positioning the ray source module and rotating the ray source module to adjust an output angle of the ray beam.
Dependencies are inferred from the claim text.