Dew point sensing in semiconductor processing system load locks

A dew point sensor arrangement, comprising:

• a sensing conduit and a dry gas source conduit coupled to a dew point sensor;
• a sensing valve with a sensing valve member coupling the sensing conduit to the dew point sensor, the sensing valve member having a sensing valve member open position and a sensing valve member closed position;
• and
• a drying valve with a drying valve member coupling the dry gas source conduit to the dew point sensor, the drying valve member having a drying valve member open position and a drying valve member closed position,
• wherein the drying valve comprises a drying valve biasing member with a drying valve biasing member coefficient, wherein the sensing valve comprises a sensing valve biasing member with a sensing valve biasing member coefficient, and wherein the drying valve biasing member coefficient is greater than the sensing valve biasing member coefficient,
• wherein the sensing valve member fluidly separates the sensing conduit from the dew point sensor in the sensing valve member closed position,
• wherein the dry gas source conduit is fluidly coupled to the dew point sensor when the drying valve member is in the drying valve member open position, and
• wherein the drying valve member moves to the drying valve member open position when the sensing valve member moves to the sensing valve member closed position to dry the dew point sensor using a dry gas provided through the dry gas source conduit.

A dew point sensing method, comprising:

• at a dew point sensor arrangement including a sensing conduit and a dry gas source conduit coupled to a dew point sensor;
• a sensing valve with a sensing valve member coupling the sensing conduit to the dew point sensor, the sensing valve member having a sensing valve member open position and a sensing valve member closed position;
• a drying valve with a drying valve member coupling the dry gas source conduit to the dew point sensor, the drying valve member having a drying valve member open position and a drying valve member closed position;
• the sensing valve member fluidly separating the sensing conduit from the dew point sensor in the sensing valve member closed position, the drying valve fluidly coupling the dry gas source conduit to the dew point sensor when the drying valve member is in the drying valve member open position,
• fluidly coupling an evacuation source to a load lock in a semiconductor processing system;
• fluidly separating the dew point sensor from the load lock using the sensing valve;
• fluidly coupling a dry gas source to the dew point sensor using the drying valve;
• flowing a dry gas to the dew point sensor through the drying valve;
• drying the dew point sensor while the load lock is evacuated using a dry gas provided to the dew point sensor by the dry gas source;
• and
• wherein the drying valve member moves to the drying valve member open position when the sensing valve member moves to the sensing valve member closed position to dry the dew point sensor using the dry gas provided through the dry gas source conduit.