Capacitive pressure sensor for detecting a pressure, comprising two pressure ranges, and production methods

A pressure sensor system, comprising:

• at least one capacitive pressure sensor element, each including:
• a pressure-sensitive membrane;
• a first measuring capacitor connected to the membrane and configured to generate a first sensor signal, wherein the first measuring capacitor has a first electrode and a second electrode;
• and
• a second measuring capacitor configured to generate a second sensor signal, wherein the second measuring capacitor has a third electrode and a fourth electrode,
• wherein:
• the first measuring capacitor is configured to generate the first sensor signal in accordance with a pressure of a first pressure range applied to the membrane, and wherein the second measuring capacitor is operated as a reference capacitor in the first pressure range, and
• the second measuring capactitor is configured to generated the second sensor signal in accordance with a pressure of a second pressure range applied to the membrane.

A micromechanical method for producing a capacitive pressure sensor element on a carrier and/or in a frame, the method comprising the following steps:

• producing a membrane;
• producing a first measuring capacitor configured to generate a first sensor signal, the first measuring capacitor being connected to the membrane, and producing, at the first measuring capacitor, a first electrode rigidly connected to the carrier or the frame and a second electrode movably connected to the membrane;
• and
• producing a second measuring capacitor configured to generate a second sensor signal, and producing, at the second measuring capacitor, a third electrode rigidly connected to the carrier or the frame and a fourth movable electrode;
• wherein
• the first sensor signal is generated in accordance with a pressure of a first pressure range applied to the membrane, wherein the second measuring capacitor is operated as a reference capacitor in the first pressure range, and
• the second sensor signal is generated in accordance with a pressure of a second pressure range applied to the membrane.

A method for generating a pressure sensor signal using a pressure sensor element, the pressure sensor element including a pressure-sensitive membrane;

• a first measuring capacitor connected to the membrane and configured to generate a first sensor signal, wherein the first measuring capacitor has a first electrode and a second electrode;
• and
• a second measuring capacitor configured to generate a second sensor signal, wherein the second measuring capacitor has a third electrode and a fourth electrode,
• wherein:
• the first measuring capacitor is configured to generate the first sensor signal in accordance with a pressure of a first pressure range applied to the membrane, and wherein the second measuring capacitor is operated as a reference capacitor in the first pressure range, and
• the second measuring capactitor is configured to generated the second sensor signal in accordance with a pressure of a second pressure range applied to the membrane;
• wherein the method comprises the following steps:
• detecting the first sensor signal of the first measuring capacitor;
• detecting the second sensor signal of the second measuring capacitor;
• and
• generating the pressure sensor signal in two different operating modes, in accordance with a course of the first sensor signal, the pressure sensor signal being generated in a first operating mode in accordance with the first sensor signal, and in a second operating mode in accordance with the second sensor signal.