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US 12,709,804 B2Granted
Organic vapor jet printing system
AssigneeUniversal Display Corporation
InventorsGregory McGraw, William E. Quinn, Gregg Kottas, Siddharth Harikrishna Mohan, Matthew King
Life of this patent
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Abstract
Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.
Claims16
An organic printing deposition system, comprising:
- a print head that is resistively heated comprising:
- a nozzle block comprising a delivery aperture, the delivery aperture being in fluid communication with a source of organic material to be deposited on a substrate by the printing deposition system;
- one or more shield gas distribution channels fluidically coupled to a plurality of shield gas apertures, each shield gas aperture being disposed around the delivery aperture, and at least one of the plurality of shield gas apertures are located on a chiller plate between the print head and substrate;
- and
- one or more exhaust channels disposed adjacent to the delivery aperture such that, during operation of the print head, non-condensing gas flow generated by the delivery aperture is captured by an exhaust aperture that is located on the chiller plate and that is configured to withdraw shield gas from the deposition chamber;
- and
- wherein the plurality of shield gas apertures are arranged to provide a flow of shield gas that prevents material from a chamber ambient in which the print head is operated from reaching the exhaust apertures of the nozzle block.
4 more elements
Dependencies are inferred from the claim text.