Methods and apparatus for solid source refill

An apparatus for refill of a solid source precursor, comprising:

• a first vessel configured to contain a liquid slurry, wherein the first vessel comprises a first vessel heating element and is configured to maintain the liquid slurry at a first temperature, wherein the slurry comprises a solid precursor powder and an inert liquid;
• a first conduit fluidly connected to the first vessel, wherein the apparatus comprises at least one first conduit pump along a flow path of the first conduit, and wherein the first conduit is configured to flow the liquid slurry through the first conduit;
• a second vessel fluidly connected to the first vessel via a first conduit, wherein the second vessel is connected to a sublimator configured to provide heat to the second vessel, and
• wherein the second vessel is configured to:
• receive the liquid slurry via the first conduit while the second vessel is at a second temperature, and
• wherein the sublimator is configured to:
• provide heat to the second vessel to a third temperature greater than the first temperature and the second temperature, wherein the liquid slurry thereby sublimates the solid precursor powder from the liquid slurry at the third temperature that is greater than the first temperature and the second temperature to form a vapor;
• a second conduit fluidly connected to the second vessel, wherein the apparatus comprises at least one second conduit pump along a flow path of the second conduit, and wherein the second conduit is configured to flow the vapor;
• a vacuum source, connected to the second vessel via a fourth conduit, configured to evaporate the inert fluid out of the second vessel;
• a third vessel connected to the second vessel via a second conduit configured to flow the vapor from the second vessel to the third vessel, wherein the third vessel comprises a third vessel heating element and is configured to operate at a fourth temperature and a fifth temperature;
• and
• a reactor connected to the third vessel via a third conduit.