Cerium based particles, process for producing the same and uses thereof in polishing
AssigneeRhodia Operations
InventorsMarie Plissonneau, Réka Toth, Thierry Le Mercier, Valérie Buissette, Manabu Yuasa, Eisaku Suda
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Abstract
The disclosure relates to cerium based particles having a rough surface and their use as a component of a polishing composition, especially for chemical mechanical polishing. The cerium based particles have substantially the shape of polyhedrons which have one or more faces with protrusions thereon, said protrusions being integrally formed with said cerium based particles. The present disclosure also relates to the method of preparation of the cerium based particles.
Claims19
Cerium based particles having substantially the shape of polyhedrons which have one or more faces with protrusions thereon, said protrusions being integrally formed with said cerium based particles, wherein the cerium based particles have a specific surface area (BET) between 16 and 55 m2/g.
Dependencies are inferred from the claim text.