Driving device
AssigneeSemes Co., Ltd.
InventorsInseok Ha, Jinhyuck Yang, Cheonsu Cho, Yongkyu Cho
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a driving device including a driving member including a power source, a slider configured to linearly move according to power supply form the power source, a guide member coupled to the slider and configured to provide a movement path to the slider, and a bracket coupled to the slider, wherein the bracket is divided into a first bracket and a second bracket separated from each other by a first gap, and includes a first cooling member configured to cool the first bracket and a second cooling member configured to cool the second bracket, and the driving member includes a third cooling member configured to cool the power source.
Claims17
A driving device comprising:
- a driving member including a power source;
- a slider configured to linearly move according to power supply from the power source;
- a guide member coupled to the slider and configured to provide a movement path to the slider;
- and
- a bracket coupled to the slider,
- wherein the bracket is divided into a first bracket and a second bracket separated from each other by a first gap,
- wherein the bracket includes a first cooling member configured to cool the first bracket and a second cooling member configured to cool the second bracket,
- wherein the driving member includes a third cooling member configured to cool the power source,
- wherein the first cooling member, the second cooling member, and the third cooling member each include a cooling passage, and
- wherein a fluid passing through the third cooling member has a lower temperature than a fluid passing through the first cooling member and the second cooling member.
A head assembly comprising:
- a chuck configured to support a substrate;
- a driving device including a driving member including a power source;
- a slider configured to linearly move according to power supply from the power source;
- a guide member configured to provide a movement path to the slider coupled to the slider;
- a bracket coupled to the slider;
- and
- at least one inkjet head coupled to the bracket and configured to dispense a chemical liquid toward the substrate,
- wherein the bracket is divided into a first bracket and a second bracket separated from each other by a first gap, and includes a first cooling member configured to cool the first bracket and a second cooling member configured to cool the second bracket,
- wherein the driving member includes a third cooling member configured to cool the power source,
- wherein the first cooling member, the second cooling member, and the third cooling member each include a cooling passage, and
- wherein a fluid passing through the third cooling member has a lower temperature than a fluid passing through the first cooling member and the second cooling member.
A head assembly comprising:
- a chuck configured to support a substrate;
- a driving device including a driving member including a power source, a slider configured to linearly move according to power supply from the power source, a guide member configured to provide a movement path to the slider coupled to the slider, and a bracket coupled to the slider;
- at least one inkjet head coupled to the bracket and configured to dispense a chemical liquid toward the substrate;
- and
- a controller,
- wherein the bracket is divided into a first bracket and a second bracket separated from each other by a first gap, and includes a first cooling member configured to cool the first bracket and a second cooling member configured to cool the second bracket,
- wherein the driving member includes a third cooling member configured to cool the power source,
- wherein a temperature of the third cooling member is lower than a temperature of the first cooling member and the second cooling member, and
- wherein the controller is further configured to control each of the first to third cooling members to switch between an operation mode and a non-operation mode.
Dependencies are inferred from the claim text.