Foreign substance removing method, film forming method, article manufacturing method, and foreign substance removing apparatus

A foreign substance removing method for removing a foreign substance, comprising:

• forming a first foreign substance trapping film between a plate and a first region where a foreign substance should be removed and separating the plate from the first region together with the first foreign substance trapping film;
• and
• after the forming the first foreign substance trapping film, forming a second foreign substance trapping film between the plate that holds the first foreign substance trapping film and a second region where a foreign substance should be removed, and separating the plate from the second region together with the first foreign substance trapping film and the second foreign substance trapping film,
• wherein the second region is larger than the first region, and a value obtained by dividing a volume of the second foreign substance trapping film by an area of the second region is larger than a value obtained by dividing a volume of the first foreign substance trapping film by an area of the first region, and
• wherein the volume of the second foreign substance trapping film is determined based on the volume of the first foreign substance trapping film, so as to compensate for a surface shape formed by the plate and the first foreign substance trapping film.