Method of cleaning a nozzle

A method of cleaning a nozzle, the method comprising:

• reducing a flow rate of a gas stream emitted from the nozzle;
• loading a cleaning apparatus on the nozzle, wherein the cleaning apparatus includes a function switching plate, a first cleaning device, and a second cleaning device;
• positioning a first hole of the function switching plate to engage the first cleaning device with the nozzle;
• vacuuming the nozzle using the first cleaning device;
• positioning a second hole, different from the first hole, of the function switching plate to engage the second cleaning device with the nozzle, wherein positioning the second hole comprises moving the function switching plate;
• mechanically cleaning the nozzle using the second cleaning device;
• measuring a level of contaminant particles in the gas stream following the vacuuming and the mechanical cleaning;
• and
• disengaging the cleaning apparatus from the nozzle in response to a determination that the level of the contaminant particles satisfies a predetermined level.

A method of cleaning a nozzle, the method comprising:

• arranging a function switching plate at a first position where a first hole of the function switching plate is aligned with a vacuum;
• engaging the vacuum with the nozzle through the first hole;
• removing contaminant particles from the nozzle using the vacuum;
• moving the function switching plate to a second position where a second hole, different from the first hole, of the function switching plate is aligned with a brush;
• engaging the brush with the nozzle through the second hole;
• removing contaminant particles adhering to the nozzle using the brush;
• measuring a level of contaminant particles in a gas stream from the nozzle using a monitoring device;
• determining whether the level of contaminant particles satisfies a predetermined level;
• and
• in response to a determination that the level of contaminant particles fails to satisfy the predetermined level, repeating the removing of contaminant particles from the nozzle using the vacuum.