Brush assembly and wafer cleaning device including the same

A wafer cleaning device, comprising:

• a first brush assembly provided on an upper surface of a wafer;
• and
• a second brush assembly provided on a lower surface of the wafer and facing the first brush assembly,
• wherein the first brush assembly comprises:
• a first brush comprising:
• a first body that is cylindrical;
• and
• a first vertical gear that is connected to a surface of the first body that faces a third body, the first vertical gear being configured to rotate in a first vertical direction;
• a second brush comprising:
• a first horizontal gear configured to rotate in a first horizontal direction;
• and
• a second body connected to a lower portion of the first horizontal gear and rotatably connected to the first body;
• and
• a third brush comprising a second vertical gear connected to a surface of the third body that faces the first body, the second vertical gear being configured to rotate in a second vertical direction that is opposite to the first vertical direction,
• wherein the first horizontal gear is engaged with a lower portion of the first vertical gear and a lower portion of the second vertical gear at right angles, and
• wherein the second brush assembly further comprises a fourth brush comprising a cylindrical body configured to rotate in the second vertical direction.

A wafer cleaning device, comprising:

• a first brush assembly provided on an upper surface of a wafer;
• and
• a second brush assembly provided on a lower surface of the wafer and facing the first brush assembly,
• wherein the first brush assembly comprises:
• a first brush comprising:
• a first body that is cylindrical;
• and
• a first vertical gear connected to a surface of the first body that faces a third body, the first vertical gear being configured to rotate in a first vertical direction;
• a second brush comprising:
• a first horizontal gear configured to rotate in a first horizontal direction, and
• a second body connected to a lower portion of the first horizontal gear and rotatably connected to the first body;
• and
• a third brush comprising a second vertical gear connected to a surface of the third body that faces the first body, the third brush being configured to rotate in a second vertical direction that is opposite to the first vertical direction,
• wherein the first horizontal gear is engaged with a lower portion of the first vertical gear and a lower portion of the second vertical gear at right angles,
• wherein the second brush assembly comprises:
• a fourth brush comprising:
• a fourth body that is cylindrical;
• and
• a third vertical gear connected to a surface of the fourth body that faces a sixth body, the third vertical gear being configured to rotate in the second vertical direction;
• a fifth brush comprising:
• a third horizontal gear configured to rotate in a second horizontal direction that is opposite to the first horizontal direction, and
• a fifth body connected to an upper portion of the third horizontal gear and rotatably connected to the fourth body;
• and
• a sixth brush comprising a fourth vertical gear connected to a surface of the sixth body that faces the fourth body, the fourth vertical gear being configured to rotate in the first vertical direction, and
• wherein the third horizontal gear is engaged with an upper portion of the third vertical gear and an upper portion of the fourth vertical gear at right angles.