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US 12,707,894 B2Granted
Element, bolometer, and element manufacturing method
AssigneeNEC Corporation
InventorTomo Tanaka
Life of this patent
Estimating the term…
Abstract
An element includes a first insulating layer, an intermediate layer which is a nanocarbon-containing film, a second insulating layer, and a contact electrode connected to an intermediate end surface which is an end surface of the intermediate layer, wherein the first insulating layer, the intermediate layer, and the second insulating layer are stacked in order.
Claims8
An element comprising:
- a first insulating layer;
- an intermediate layer which is a nanocarbon-containing film;
- a second insulating layer;
- and
- a contact electrode connected to an intermediate end surface which is an end surface of the intermediate layer,
- wherein the first insulating layer, the intermediate layer, and the second insulating layer are stacked in order, and
- wherein a first end surface which is an end surface of the first insulating layer, the intermediate end surface, and a second end surface which is an end surface of the second insulating layer are continuous.
4 more elements
An element manufacturing method comprising:
- forming a first insulating layer;
- forming an intermediate layer which is a nanocarbon-containing film;
- and
- forming a second insulating layer,
- wherein the first insulating layer, the intermediate layer, and the second insulating layer are stacked in order,
- wherein the method further comprises
- forming a stacked end surface by cutting out the first insulating layer, the intermediate layer and the second insulating layer after forming the second insulating layer, and
- forming a contact electrode connected to an intermediate end surface which is an end surface of the intermediate layer in the stacked end surface after forming the stacked end surface, and
- wherein a first end surface which is an end surface of the first insulating layer, the intermediate end surface, and a second end surface which is an end surface of the second insulating layer are continuous on the stacked end surface.
6 more elements
Dependencies are inferred from the claim text.