Quantum-particle cell with patterned transparent conductive oxides
AssigneeColdQuanta, Inc.
InventorSteven Michael Hughes
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AssigneeColdQuanta, Inc.
InventorSteven Michael Hughes
Estimating the term…
A quantum-particle cell manufacturing process includes coating a substrate with transparent conductive oxide (TCO) such as indium tin oxide (ITO). Regions of the TCO are then transformed, e.g., by pulsed-laser annealing, to increase their resistivity. The annealed region then electrically isolates adjacent higher conductivity and lower resistivity regions, which can serve as field plates. At least one annealed region extends from the cell interior through a bond between the substrate and sidewalls and into the cell exterior so that adjacent unannealed regions can serve as independently controllable feedthroughs. The annealing does not significantly affect the TCO thickness so the bond between the substrate and the sidewall structure remains intact and the completed quantum particle cell can be hermetically sealed.
A process comprising:
A quantum-particle cell system comprising:
Dependencies are inferred from the claim text.