Heater
AssigneeKYOCERA Corporation
InventorTakashi Miyaguchi
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Abstract
A heater includes a ceramic base and a heat generating resistor. The ceramic base includes a plurality of crystal particles made of silicon nitride and a first grain boundary phase located between the plurality of crystal particles and containing oxides of a rare earth element and silicon. The heat generating resistor is located inside the ceramic base. The ceramic base includes a first region including an interface with the heat generating resistor and a second region farther away from the heat generating resistor than the first region. The distribution amount of the first grain boundary phase is greater in the first region than in the second region.
Claims7
A heater comprising:
- a ceramic base comprising
- a plurality of crystal particles made of silicon nitride, and
- a first grain boundary phase located between the plurality of crystal particles and containing oxides of a rare earth element and silicon;
- and
- a heat generating resistor located inside the ceramic base, wherein
- the ceramic base comprises
- a first region comprising an interface with the heat generating resistor, and
- a second region farther away from the heat generating resistor than the first region, and
- a distribution amount of the first grain boundary phase in the first region is greater than a distribution amount of the first grain boundary phase in the second region.
Dependencies are inferred from the claim text.