Near field transducer with template layer for improved reliability
AssigneeHeadway Technologies, Inc.
InventorsWeihao Xu, Shengyuan Wang, Dingchuan Xue
Life of this patent
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Abstract
A method of fabricating a near field transducer (NFT) in a thermally assisted magnetic recording (TAMR) head is disclosed. In some embodiments, the method includes: depositing a dielectric layer and a template layer on a waveguide core; patterning the template layer to form a template; depositing an Au NFT layer; planarizing the Au NFT layer to generate a planar layer; depositing an upper NFT layer; applying a peg patterning mask; etching the upper NFT layer and the planar layer that includes the Au NFT layer; removing the template; and depositing a dielectric material and planarizing an upper surface that includes the upper NFT layer.
Claims17
A near field transducer (NFT) that is part of a thermally assisted magnetic recording (TAMR) head, the NFT comprising:
- a dielectric layer and a template layer disposed on a waveguide core;
- an NFT layer disposed adjacent to the dielectric layer;
- an upper NFT layer disposed adjacent to the NFT layer, wherein the NFT layer and the upper NFT layer are etched according to a pattern, and wherein the template layer is removed after etching of the NFT layer and the upper NFT layer.
Dependencies are inferred from the claim text.