Salt, acid generator, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKatsuhiro Komuro, Koji Ichikawa
Life of this patent
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Abstract
Disclosed are a salt represented by formula (I), an acid generator, and a resist composition: wherein Q1, Q2, R1 and R2 each represent a hydrogen atom, a fluorine atom, an alkyl group, etc.; z represents an integer of 0 to 6; X1 represents *—CO—O—, *—O—CO—, etc.; L1 and L2 each represent a single bond or an aliphatic hydrocarbon group; Ar1 represents an aromatic hydrocarbon group or a heterocyclic aromatic hydrocarbon group; R3 represents *—O—R10, *—O—CO—R10, etc., and R10 represents an acid-labile group; R4 represents a halogen atom, a haloalkyl group, or a hydrocarbon group; and m4 represents an integer of 0 to 8; and Z+ represent an organic cation.
Claims13
A salt represented by formula (I):
- wherein, in formula (I),
- Q1 and Q2 each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms,
- R1 and R2 each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms,
- z represents an integer of 0 to 6, and when z is 2 or more, a plurality of R1 and R2 may be the same or different from each other,
- X1 represents *—CO—O—, *—O—CO—, *—O—CO—O— or *—O—, and * represents a bonding site to C(R1)(R2) or C(Q1)(Q2),
- L1 and L2 each independently represent a single bond or an aliphatic hydrocarbon group having 1 to 12 carbon atoms, and —CH2— included in the aliphatic hydrocarbon group may be replaced by —O— or —CO—,
- A1 represents a ring represented by the following, —CH2— included in the ring may be replaced by —CO—, a hydrogen atom included in the ring may be substituted with an alkyl group having 1 to 6 carbon atoms or a hydroxy group, and one of two * represents a bonding site to L1 and the other one represents a bonding site to L2,
- Ar1 represents an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms,
- R3 represents *—O—R10, *—O—CO—R10, *—O—CO—O—R10 or *—O-L10-CO—O—R10, and * represents a bonding site to Ar1,
- L10 represents an alkanediyl group having 1 to 6 carbon atoms,
- R10 represents an acid-labile group,
- R4 represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and —CH2— included in the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- m4 represents an integer of 0 to 8, and when m4 is 2 or more, a plurality of R4 may be the same or different from each other, and
- Z+ represents an organic cation.
Dependencies are inferred from the claim text.