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US 12,704,763 B2Granted
Photonic circuitry having multiple optical resonators
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorWen-Hao Cheng
Life of this patent
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Abstract
An optical device includes a first ring resonator with a first radius, a second ring resonator with a second radius, and an optical waveguide feeding the first and second ring resonators in parallel. The first and second ring resonators are positioned on opposing sides of the optical waveguide. The first and second ring resonators and the optical waveguide are disposed above a semiconductor substrate.
Claims20
An optical device, comprising:
- a first ring resonator with a first radius;
- a second ring resonator with a second radius;
- a third ring resonator with a third radius and stacked directly under the first ring resonator;
- a fourth ring resonator with a fourth radius and stacked directly under the second ring resonator;
- and
- an optical waveguide feeding the first and second ring resonators in parallel, wherein the first and second ring resonators are positioned on opposing sides of the optical waveguide, wherein the optical waveguide includes a straight rail, wherein when viewed from top a virtual line connecting centers of the first and second ring resonators is perpendicular to a lengthwise direction of the straight rail, and wherein the first and second ring resonators and the optical waveguide are embedded in a dielectric layer disposed above a semiconductor substrate.
3 more elements
An optical device, comprising:
- a first ring resonator with a first radius;
- a second ring resonator with a second radius;
- a first optical waveguide directly injecting photons into the first ring resonator;
- and
- a second optical waveguide accepting photons escaping from the second ring resonator, wherein the first and second ring resonators are positioned between the first and second optical waveguides, wherein the first and second ring resonators and the first and second optical waveguides are all disposed above a top surface of a semiconductor substrate, and wherein a distance between the first ring resonator and the top surface of the semiconductor substrate is different from a distance between the second ring resonator and the top surface of the semiconductor substrate.
2 more elements
A method, comprising:
- sending a source light beam into a first optical waveguide, wherein the first optical waveguide has a first straight rail extending lengthwise along a first direction;
- direct injecting the source light beam into a first ring resonator through an end portion of the first optical waveguide that is in physical contact with the first ring resonator, wherein a fraction of the source light beam is converted into a signal light beam via a spontaneous four-wave mixing process;
- coupling photons in at least the signal light beam into a second ring resonator through near-field coupling between the first ring resonator and the second ring resonator;
- and
- coupling the photons into a second optical waveguide through near-field coupling between the second ring resonator and the second optical waveguide, wherein the second optical waveguide has a second straight rail extending lengthwise along a second direction that is different from the first direction,
- wherein the first and second ring resonators and the first and second optical waveguides are all embedded in a dielectric layer disposed above a top surface of a semiconductor substrate.
3 more elements
Dependencies are inferred from the claim text.