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US 12,704,759 B2Granted
Asymmetrical semiconductor-based optical modulator
AssigneeMarvell Asia Pte Ltd
InventorsHamed Pishvaibazargani, Jie Lin, Masaki Kato
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Abstract
An optical modulator includes a semiconductor substrate and an optical waveguide portion disposed on the semiconductor substrate. A signal contact that extends alongside the optical waveguide portion is disposed on the semiconductor substrate. A first ground line is disposed on the semiconductor substrate spaced away from the signal contact by a first spacing. A second ground line is disposed on the semiconductor substrate spaced away from the signal contact by a second spacing opposite the first ground line. The first spacing is different from the second spacing.
Claims15
An optical modulator, including:
- a semiconductor substrate;
- an optical waveguide portion disposed on the semiconductor substrate, the optical waveguide portion configured to provide an optical path for light that is to be modulated;
- a signal contact disposed on the semiconductor substrate, the signal contact extending alongside the optical path;
- a first ground line disposed on the semiconductor substrate and spaced a first distance away from the signal contact, the optical waveguide portion disposed between the signal contact and the first ground line, the first distance selected based on a desired field strength across the optical waveguide portion;
- and
- a second ground line disposed on the semiconductor substrate spaced a second distance away from the signal contact, the first distance different from the second distance, the signal contact disposed between the optical waveguide portion and the second ground line, the second distance selected to be longer than the first distance based on a target impedance for a travelling electrical-domain signal.
3 more elements
Dependencies are inferred from the claim text.