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US 12,704,565 B2Granted
Magnetic sensor and its manufacturing method
AssigneeTDK Corporation
InventorsKenzo Makino, Takafumi Kobayashi
Life of this patent
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Abstract
A magnetic sensor includes an MR element and a support member. A top surface of the support member includes an inclined portion. The MR element includes an MR element main body, a lower electrode, and an upper electrode. The lower electrode includes a first end closest to a lower end of the inclined portion and a second end closest to an upper end of the inclined portion. The MR element main body is located at a position closer to the second end than to the first end.
Claims8
A magnetic sensor comprising:
- a magnetoresistive element;
- and
- a support member that supports the magnetoresistive element, wherein
- the support member includes a top surface and a bottom surface located on a side opposite to the top surface,
- the top surface of the support member includes an inclined portion inclined relative to the bottom surface,
- the magnetoresistive element includes a main body and a lower electrode,
- the main body is located on the inclined portion,
- the lower electrode is interposed between the main body and the inclined portion,
- the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface,
- a part of the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion, and
- a distance from the upper end of the inclined portion to the first end of the part of the lower electrode is greater than a distance from the upper end of the inclined portion to the lower end of the inclined portion.
8 more elements
A magnetic sensor comprising:
- a magnetoresistive element;
- and
- a support member that supports the magnetoresistive element, wherein the support member includes a top surface and a bottom surface located on a side opposite to the top surface,
- the top surface of the support member includes an inclined portion inclined relative to the bottom surface,
- the magnetoresistive element includes a main body and a lower electrode, the main body is located on the inclined portion,
- the lower electrode is interposed between the main body and the inclined portion,
- the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface,
- a part of the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion, and
- wherein a distance from the upper end of the inclined portion to the first end of the part of the lower electrode is smaller than a distance from the upper end of the inclined portion to the lower end of the inclined portion.
6 more elements
A magnetic sensor comprising:
- a magnetoresistive element;
- and
- a support member that supports the magnetoresistive element, wherein
- the support member includes a top surface and a bottom surface located on a side opposite to the top surface,
- the top surface of the support member includes an inclined portion inclined relative to the bottom surface,
- the magnetoresistive element includes a main body, a lower electrode, and an upper electrode,
- the main body is located on the inclined portion,
- the lower electrode is interposed between the main body and the inclined portion,
- the upper electrode is located on the main body,
- the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface,
- a part of the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion,
- the upper electrode includes a third end closest to the lower end of the inclined portion, and
- a distance from the main body to the third end of the upper electrode is smaller than a distance from the main body to the first end of the part of the lower electrode.
10 more elements
A magnetic sensor comprising:
- a magnetoresistive element;
- and
- a support member that supports the magnetoresistive element, wherein
- the support member includes a top surface and a bottom surface located on a side opposite to the top surface,
- the top surface of the support member includes an inclined portion inclined relative to the bottom surface,
- the magnetoresistive element includes a main body, a lower electrode, and an upper electrode,
- the main body is located on the inclined portion,
- the lower electrode is interposed between the main body and the inclined portion,
- the upper electrode is located on the main body,
- the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface,
- a part of the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion,
- the upper electrode includes a third end closest to the lower end of the inclined portion, and
- a distance from the upper end to the third end of the upper electrode is smaller than a distance from the upper end to the first end of the part of the lower electrode.
10 more elements
Dependencies are inferred from the claim text.