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US 12,704,407 B2Granted
Substrate measurement systems having substrate holders
AssigneeApplied Materials, Inc.
InventorsChenfei Hu, Chao Liu, Chien-Min Liao, Marc David Shull, Michael Kutney
Life of this patent
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Abstract
An apparatus includes a substrate holder having a surface to receive a substrate. The surface has a texture that causes an optical beam incident on the surface to scatter in at least one direction away from an optical detector to be located above the substrate holder.
Claims18
An apparatus comprising:
- a substrate holder having a surface to receive a substrate, wherein the surface has a texture defined by a pattern of holes that causes an optical beam incident on the surface to scatter in at least one direction away from an optical detector to be located above the substrate holder.
A system comprising:
- a substrate holder having a surface to receive a substrate;
- and
- an optical detector located above the substrate holder, wherein the surface has a texture defined by a pattern of holes that causes an optical beam incident on the surface to scatter in at least one direction away from an optical detector to be located above the substrate holder.
A method comprising:
- causing, by at least one processing device, at least one optical beam to be directed toward a substrate secured to a surface of a substrate holder;
- receiving, by the at least one processing device, at least one reflected optical beam for processing, wherein the surface has a texture defined by a pattern of holes that causes an optical beam incident on the surface to scatter in at least one direction away from an optical detector to be located above the substrate holder;
- and
- processing, by the at least one processing device, the at least one reflected optical beam to determine at least one property of the substrate.
1 more element
Dependencies are inferred from the claim text.