Measurement method and measurement system
AssigneeTokyo Electron Limited
InventorHikaru Fujiwara
Life of this patent
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Abstract
A measurement method according to an exemplary embodiment acquires a measured value indicating a capacitance between a measuring instrument and an edge ring in a chamber. The measuring instrument includes a base substrate and a sensor electrode provided on the base substrate. The method includes holding, on a stage in the chamber, the edge ring having a conductive film formed on a surface thereof. The method includes transporting the measuring instrument to a region on the stage which is surrounded by the edge ring. The method includes acquiring the measured value indicating the capacitance between the measuring instrument and the edge ring having the conductive film by using the measuring instrument transported to the inner side of the region.
Claims20
A measurement method, the method comprising:
- providing a processing system including:
- a process module including a chamber main body and a stage, the chamber main body including a chamber, the stage being provided in the chamber and on which a measuring instrument is to be placed;
- a transport device configured to transport the measuring instrument into the chamber, the transport device being an articulated robot;
- and
- controller circuitry configured to control an operation of the transport device, the measuring instrument including:
- a disc-shaped base substrate;
- and
- sensor electrodes provided on the disc-shaped base substrate and facing outward in a radial direction,
- holding an edge ring on the stage;
- transporting the measuring instrument to a region surrounded by the edge ring on the stage;
- and
- acquiring measured values indicating capacitances between the sensor electrodes and the edge ring by using the measuring instrument transported to an inner side of the region, wherein
- the edge ring includes an edge ring body and a conductive film, the conductive film being formed on at least a part of a surface of the edge ring body and the conductive film having a composition different from a composition of the edge ring body in composition.
A measurement system, the measurement system comprising:
- a measuring instrument including
- a disc-shaped base substrate,
- sensor electrodes provided on the disc-shaped base substrate and facing outward in a radial direction, and
- arithmetic circuitry configured to calculate measured values indicating capacitances respectively formed by the sensor electrodes;
- and
- a processing system including
- a process module including a chamber main body and a stage, the chamber main body including a chamber, the stage being provided in the chamber and on which the measuring instrument is to be placed;
- a transport device configured to transport the measuring instrument into the chamber, the transport device being an articulated robot;
- and
- controller circuitry configured to control an operation of the transport device, wherein
- the stage is configured to hold an edge ring,
- the controller circuitry is configured to control the transport device to transport the measuring instrument to a region surrounded by the edge ring on the stage,
- the arithmetic circuitry is configured to calculate the measured values indicating the capacitances between the sensor electrodes of the measuring instrument transported to an inner side of the region and the edge ring, and
- the edge ring includes an edge ring body and a conductive film, the conductive film being formed on at least a part of a surface of the edge ring body and the conductive film having a composition different from a composition of the edge ring body.
Dependencies are inferred from the claim text.