Fluid flow valve and methods of operating thereof
AssigneeApplied Materials, Inc.
InventorsDavid Ishikawa, Sumedh Dattatraya Acharya, Arun Nagarajan, Ming Xu
Life of this patent
Estimating the term…
Abstract
Certain embodiments of the present disclosure relate to a fluid flow valve. The fluid flow valve includes a housing configured to receive a flow of fluid. The fluid flow valve further includes a first valve portion configured to proportionally control the flow of fluid through the housing. The fluid flow valve further includes a second valve portion in series with the first valve portion along a fluid flow path within the housing. The second valve portion is configured to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid.
Claims19
A fluid flow valve, comprising:
- a housing configured to receive a flow of fluid;
- a first valve portion configured to proportionally control the flow of fluid along an axisymmetric flow path through the first valve portion and into an intermediate channel within the housing, wherein the first valve portion comprises a moveable diaphragm actuatable to choke the flow of fluid;
- and
- a second valve portion in series with the first valve portion along a fluid flow path formed by the intermediate channel, wherein the second valve portion is coaxial with the first valve portion and the intermediate channel, and wherein the second valve portion is configured to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid.
A fluid flow system, comprising:
- a valve comprising:
- a housing configured to receive a flow of fluid;
- a first valve portion configured to proportionally control the flow of fluid along an axisymmetric flow path through the first valve portion and into an intermediate channel within the housing, wherein the first valve portion comprises a moveable diaphragm actuatable to choke the flow of fluid;
- a second valve portion in series with the first valve portion along a fluid flow path formed by the intermediate channel, wherein the second valve portion is coaxial with the first valve portion and the intermediate channel;
- and
- a processing device configured to:
- cause the first valve portion to actuate to proportionally control the flow of fluid through the first valve portion and into the intermediate channel;
- and
- cause the second valve portion to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid.
A method, comprising:
- receiving target flow data associated with a flow of fluid through a valve having a first valve portion and a second valve portion in series with the first valve portion along a fluid flow path formed by an intermediate channel within a housing of the valve, wherein the first valve portion is configured to proportionally control the flow of fluid along an axisymmetric flow path through the first valve portion and into the intermediate channel, wherein the first valve portion comprises a moveable diaphragm actuatable to choke the flow of fluid, and wherein the second valve portion is coaxial with the first valve portion and the intermediate channel;
- causing the first valve portion to actuate to proportionally control the flow of fluid through the housing based at least in part on the target flow data;
- and
- causing the second valve portion to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid based at least in part on the target flow data.
Dependencies are inferred from the claim text.