Coating drum and system for vapor deposition
AssigneeSkycap Investment Holdings Inc.
InventorsMaciej Jastrzebski, Andrew Skoko
Life of this patent
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AssigneeSkycap Investment Holdings Inc.
InventorsMaciej Jastrzebski, Andrew Skoko
Estimating the term…
A vapor deposition system includes a drum. The drum includes a generally cylindrical drum core. A process ring is fixedly disposed on the drum core at a position radially outward of the drum core. The process ring includes an inner face that extends radially, an outer face that extends radially opposite the inner face, and an outer-facing surface extending between the inner face and the outer face. The outer-facing surface has a plurality of axial channels formed therethrough. A plurality of fluid coolant passages extends through the process ring. An annular gas channel is in communication with the plurality of axial channels. A fluid conduit assembly is configured to supply a fluid coolant to the fluid coolant passages and a thermal coupling gas to the annular gas channel. The axial channels direct thermal coupling gas toward the substrate.
A drum for a vapor deposition system, comprising:
Dependencies are inferred from the claim text.