Imprint apparatus and article manufacturing method

An imprint apparatus that forms a pattern in an imprint material on a substrate by using a mold, the apparatus comprising:

• a mold holding unit configured to hold and drive the mold;
• a substrate holding unit configured to hold and drive the substrate;
• a measurement unit configured to measure a distance to a surface of the mold held by the mold holding unit, thereby obtaining a measurement value;
• a driving unit configured to drive the measurement unit in a direction along a reference surface serving as a reference for driving the substrate holding unit;
• and
• a control unit configured to perform measurement processing of measuring the distance by the measurement unit for a plurality of portions of a structure provided on the surface of the mold while driving the measurement unit by the driving unit, thereby obtaining a position of the mold in the direction from measurement values of the plurality of portions,
• wherein
• the measurement value includes a cyclic error caused by a distance between the measurement unit and the mold, and
• before performing the measurement processing, the control unit adjusts a position of the mold holding unit in a direction intersecting the reference surface such that the distance measured by the measurement unit falls within a distance range corresponding to a range where the measurement value is insensitive to the cyclic error, and
• before adjusting the position of the mold holding unit in the direction intersecting the reference surface, the control unit performs pre-driving of driving the measurement unit in the direction along the reference surface by the driving unit.