Imprint apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorHiroyuki Koide
Life of this patent
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Abstract
An imprint apparatus performs alignment between a substrate and a mold in a state in which the mold is in contact with an imprint material on the substrate, and then cures the imprint material by light irradiation. The apparatus includes a light irradiator configured to perform first light irradiation for partially curing the imprint material, and second light irradiation for deforming the substrate, and a controller configured to control the light irradiator. In the alignment, the controller performs switching between the first light irradiation and the second light irradiation based on a viscoelasticity of the imprint material or a deformation amount of the substrate.
Claims9
An imprint apparatus that performs alignment between a substrate and a mold in a state in which the mold is in contact with an imprint material on the substrate, and then cures the imprint material by light irradiation, the apparatus comprising:
- a substrate stage configured to hold the substrate;
- a light irradiator configured to perform first light irradiation for partially curing the imprint material, and second light irradiation for deforming the substrate, wherein, in the second light irradiation, the light irradiator irradiates the substrate with light at a wavelength at which the imprint material is not cured,
- a measurement device configured to measure a vibration amount of a position of one of the substrate and the substrate stage;
- and
- a controller configured to control the light irradiator,
- wherein, in the alignment, the controller is configured to perform switching between the first light irradiation and the second light irradiation based on a viscoelasticity of the imprint material corresponding to the vibration amount.
Dependencies are inferred from the claim text.