Pressurization system
AssigneeNikkiso Co., Ltd.
InventorsKeita Nasu, Takahiro Mori, Takahiro Morinaga, Taku Nakamura
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AssigneeNikkiso Co., Ltd.
InventorsKeita Nasu, Takahiro Mori, Takahiro Morinaga, Taku Nakamura
Estimating the term…
A pressurization system executes a pressurization process and related processes for a workpiece. The pressurization system includes a plurality of execution areas where any one of processes of the plurality of processes is executed and a chamber unit accommodating the workpiece and being conveyed through the executed areas. The execution areas are disposed according to an order in which the processes are executed. The chamber unit includes a ceiling portion disposed above the workpiece and that functions as an upper pressurizing unit pressurizing the workpiece from above in the pressurization process, a floor portion disposed below the workpiece and that functions as a lower pressurizing unit pressurizing the workpiece from below in the pressurization process, and a peripheral wall portion disposed to surround the entire perimeter of the workpiece and that defines, together with the ceiling portion and the floor portion, an accommodating chamber where the workpiece is accommodated.
A pressurization system for executing a pressurization process for a workpiece and a related process related to the pressurization process, the pressurization system comprising:
Dependencies are inferred from the claim text.