Interchangeable-object holding apparatus and method for an euv metrology system

An interchangeable-object holding apparatus for an EUV metrology system for holding and providing an interchangeable object, which is intended to be used interchangeably within the EUV metrology system,

• having an interchangeable-object holder, which is drivably displaceable in a plurality of degrees of freedom of translation and/or rotation via at least one holder drive,
• having a calibration device for calibrating a relative position of the interchangeable object in the interchangeable-object holder with respect to a calibration object of the interchangeable-object holding apparatus,
• wherein the calibration device comprises:
• at least one holder abutment body, which is secured to the interchangeable-object holder,
• at least one calibration-object counter-abutment body, which is secured to the calibration object,
• at least one contact sensor for detecting a contact between the holder abutment body and the calibration-object counter-abutment body,
• having an evaluation unit, which is in signal communication with the holder drive and the contact sensor, for determining the relative position of the interchangeable object in the interchangeable-object holder with respect to the calibration object from captured position and measurement data of the holder drive and of the contact sensor.