Substrate transfer robot and substrate processing apparatus including substrate transfer robot

A substrate processing apparatus that processes a substrate, the substrate processing apparatus comprising:

• a substrate transfer robot that transfers the substrate;
• a processing unit that performs a preset process to the substrate having been transferred by the substrate transfer robot;
• and
• a controller,
• wherein the substrate transfer robot includes a hand capable of gripping the substrate in a horizontal orientation,
• the hand includes:
• a hand body;
• a plurality of guides provided on a top surface of the hand body and receiving an outer edge portion of the substrate, and including a distal guide disposed on a distal end of the hand body;
• a pusher disposed on a proximal end of the hand body and capable of coming into contact with a side surface of the substrate;
• a pusher actuator that moves the pusher horizontally;
• and
• a weight sensor unit that measures a weight of the substrate placed on the hand,
• the distal guide and the pusher are caused by the pusher actuator to grip the substrate that is in the horizontal orientation on the plurality of guides, by clasping the substrate in the horizontal direction, and
• the controller changes a gripping force for gripping the substrate on the plurality of guides by controlling the pusher actuator depending on the weight measured by the weight sensor unit.