Surface property measuring system, surface property measuring method, polishing apparatus, and polishing method

A surface property measuring system comprising:

• an optical measuring device configured to direct light to a polishing surface of a polishing pad when the polishing pad is rotating, and measure a surface property of the polishing pad based on reflected light from the polishing surface;
• a cover member disposed between the optical measuring device and the polishing pad, the cover member having a light transmissive portion on an optical path of the light and the reflected light;
• a transparent-liquid supply line coupled to an inlet port provided in the cover member, the transparent-liquid supply line being configured to supply a transparent liquid onto the polishing pad through the inlet port;
• a transparent-liquid suction line coupled to a suction port provided in the cover member, the transparent-liquid suction line being configured to suck the transparent liquid on the polishing pad through the suction port;
• and
• a suction flow-rate regulating valve configured to be able to regulate a flow rate of the transparent liquid to be sucked by the transparent-liquid suction line.

A surface property measuring system comprising:

• an optical measuring device configured to direct light to a polishing surface of a polishing pad when the polishing pad is rotating, and measure a surface property of the polishing pad based on reflected light from the polishing surface;
• a cover member disposed between the optical measuring device and the polishing pad, the cover member having a light transmissive portion on an optical path of the light and the reflected light;
• a transparent-liquid supply line coupled to an inlet port provided in the cover member, the transparent-liquid supply line being configured to supply a transparent liquid onto the polishing pad through the inlet port;
• an imaging device configured to generate an image of a monitoring region including a measurement point on the polishing surface where the light is applied and the light is reflected;
• a supply flow-rate regulating valve configured to be able to regulate a flow rate of the transparent liquid to be supplied from the transparent-liquid supply line;
• and
• an operation controller configured to control an operation of the supply flow-rate regulating valve based on the image of the monitoring region.

A surface property measuring system comprising:

• an optical measuring device configured to direct light to a polishing surface of a polishing pad when the polishing pad is rotating, and measure a surface property of the polishing pad based on reflected light from the polishing surface;
• a cover member disposed between the optical measuring device and the polishing pad, the cover member having a light transmissive portion on an optical path of the light and the reflected light;
• a transparent-liquid supply line coupled to an inlet port provided in the cover member, the transparent-liquid supply line being configured to supply a transparent liquid onto the polishing pad through the inlet port;
• a first prism disposed between the optical measuring device and the cover member, the first prism being configured to allow the light from the optical measuring device to pass therethrough and deflect an optical path of the light;
• a second prism disposed between the optical measuring device and the cover member, the second prism being configured to allow the reflected light from the polishing surface to pass therethrough and deflect an optical path of the reflected light;
• and
• a light shielding member disposed between the first prism and the second prism, the light shielding member being configured to block light between the first prism and the second prism,
• wherein the cover member includes a first cover member configured to allow the light from the optical measuring device to pass therethrough, and the second cover member configured to allow the reflected light from the polishing surface to pass therethrough, and
• the light shielding member is disposed between the first cover member and the second cover member, and is configured to block light between the first cover member and the second cover member.

A surface property measuring method comprising:

• rotating a polishing table together with a polishing pad which is supported by the polishing table;
• supplying a transparent liquid onto the polishing pad through an inlet port provided in a cover member, the cover member being disposed between an optical measuring device and the polishing pad and having a light transmissive portion;
• and
• directing light to a polishing surface of the polishing pad through the light transmissive portion, receiving reflected light from the polishing surface through the light transmissive portion, and measuring a surface property of the polishing pad based on the reflected light by the optical measuring device.