Material processing by turbo burst ultrafast laser pulse
AssigneeApplied Materials, Inc.
InventorS. Abbas Hosseini
Life of this patent
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Abstract
A method for scribing transparent material with a laser is provided. The method includes providing relative movement between the laser and the transparent material, pulsing the laser at a first pulse repetition rate in a kHz range to establish a speed of scribing of the transparent material, and forming each of said first laser pulses with a series of second laser pulses having a second pulse repetition rate in a MHz range, wherein each of said second lasers pulses is formed from a series of third laser pulses having a third pulse repetition rate in a GHz range.
Claims18
A method for scribing transparent material with a laser, comprising:
- providing relative movement between the laser and the transparent material, the transparent material having a top surface and a bottom surface;
- pulsing the laser at a first pulse repetition rate in a kHz range from 1 KHz to less than 1000 kHz to form a plurality of first laser pulses and to establish a speed of scribing of the transparent material, wherein each of the first laser pulses is comprised of a series of second laser pulses having a second pulse repetition rate in a MHz range from 1 MHz to less than 1000 M MHz, and wherein each of the second lasers pulses is comprised of a series of third laser pulses having a third pulse repetition rate in a GHz range from 1 GHz to less than 1000 GHZ;
- directing the first laser pulses into the top surface of the transparent material;
- and
- focusing the first laser pulses to induce optical breakdown of the transparent material in a region within the transparent material that overlaps the bottom surface.
A method for scribing a transparent material with a laser, the method comprising:
- providing relative movement between a laser and the transparent material, wherein the transparent material has a top surface and a bottom surface;
- pulsing the laser to form a plurality of pulse bursts, wherein each pulse burst comprises a plurality of laser pulses having a pulse repetition rate in a range of from 1 GHz to less than 1000 GHz with a pulse spacing therebetween that is less than 1 nanosecond;
- directing the laser into the top surface of the transparent material;
- and
- focusing the laser pulses to induce optical breakdown of the transparent material in a region within the transparent material that overlaps the bottom surface, wherein each pulse burst is configured to annihilate a prior pulse burst in the transparent material and create free electrons through ionization.
Dependencies are inferred from the claim text.