Package structure and method for fabricating the same
AssigneesTaiwan Semiconductor Manufacturing Company, Ltd., National Taiwan University
InventorsTzu-Hsuan Chang, Chien-Liang Chen, Rong-Teng Lin
Life of this patent
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Abstract
A method for fabricating a package structure is provided. The method includes premixing cellulose nanofibrils (CNFs) and a two-dimensional (2D) material in a solvent to form a solution; removing the solvent from the solution to form a composite filler; mixing a prepolymeric material with the composite filler to form a composite material; and performing a molding process using the composite material.
Claims20
A method for fabricating a package structure, comprising:
- premixing cellulose nanofibrils (CNFs) as a first one-dimensional (1D) nanomaterial and a first two-dimensional (2D) material in a solvent to form a first solution, wherein a weight of the CNFs to a weight of the first 2D material define a first premixing weight ratio;
- removing the solvent from the first solution to form a first composite filler;
- mixing a first prepolymeric material with the first composite filler to form a first composite material;
- dispensing the first composite material between a package substrate and a semiconductor package device disposed over the package substrate;
- premixing a second 1D nanomaterial and a second 2D material in a second solution, such that a second premixing weight ratio of a weight of the second 1D nanomaterial to a weight of the second 2D material is different than the first premixing weight ratio of the weight of the CNFs to the weight of the first 2D material;
- drying the second solution to form a second composite filler;
- melt-mixing a second prepolymeric material with the second composite filler to form a second composite material;
- and
- dispensing the second composite material over the semiconductor package device and the package substrate, wherein the second 2D material comprises hexagonal boron nitride.
A method for fabricating a package structure, comprising:
- premixing a first one-dimensional (1D) nanomaterial and a first 2D material in a first solution, wherein the first 1D nanomaterial has a higher length-to-width ratio than the first 2D material, such that a first premixing weight ratio of a weight of the first 1D nanomaterial to a weight of the first 2D material is in a range from about 10% to about 90%;
- drying the first solution to form a first composite filler;
- melt-mixing a first prepolymeric material with the first composite filler to form a first composite material;
- encapsulating a die using the first composite material;
- attaching the die to a package substrate;
- premixing a second 1D nanomaterial and a second 2D material in a second solution, such that a second premixing weight ratio of a weight of the second 1D nanomaterial to a weight of the second 2D material is different than the first premixing weight ratio of the weight of the first 1D nanomaterial to the weight of the first 2D material;
- drying the second solution to form a second composite filler;
- melt-mixing a second prepolymeric material with the second composite filler to form a second composite material comprising the second prepolymeric material and the second composite filler;
- and
- dispensing the second composite material between the die and the package substrate.
A method for fabricating a package structure, comprising:
- premixing carbon nanotubes and a hexagonal boron nitride in a first solvent to form a first solution, wherein a weight of the carbon nanotubes to a weight of the hexagonal boron nitride define a first premixing weight ratio;
- removing the first solvent from the first solution to form a first composite filler;
- pulverizing the first composite filler;
- mixing a first prepolymeric material with the first pulverized composite filler to form a first composite material;
- encapsulating a die using the first composite material, the first composite material comprising the carbon nanotubes and the hexagonal boron nitride;
- attaching the die to a package substrate;
- premixing a 1D nanomaterial and graphene in a second solvent to form a second solution, wherein a weight of the 1D nanomaterial to a weight of the graphene define a second premixing weight ratio different than the first premixing weight ratio of the weight of the carbon nanotubes to the weight of the hexagonal boron nitride;
- removing the second solvent from the second solution to form a second composite filler;
- pulverizing the second composite filler;
- mixing a second prepolymeric material with the pulverized composite filler to form a second composite material;
- and
- depositing the second composite material comprising the 1D nanomaterial and the graphene over the package substrate and the die.
Dependencies are inferred from the claim text.