Substrate trench for improved hybrid bonding
AssigneeIntel Corporation
InventorsZhihua Zou, Omkar Karhade, Botao Zhang, Julia Chiu, Vivek Chidambaram, Yi Shi, Mohit Bhatia, Mostafa Aghazadeh
Life of this patent
Estimating the term…
Loading patent…
AssigneeIntel Corporation
InventorsZhihua Zou, Omkar Karhade, Botao Zhang, Julia Chiu, Vivek Chidambaram, Yi Shi, Mohit Bhatia, Mostafa Aghazadeh
Estimating the term…
Bonding pedestals on substrates, and their manufacture, for direct bonding integrated circuit (IC) dies onto substrates. The electrical interconnections of one or more IC dies and a substrate are bonded together with the IC dies on and overhanging the pedestals. A bonding pedestal may be formed by etching down the substrate around the interconnections. A system may include one or more such pedestals above and adjacent a recessed surface on a substrate with IC dies overhanging the pedestals. Such a system may be coupled to a host component, such as a board, and a power supply via the host component.
An apparatus, comprising:
A system, comprising:
Dependencies are inferred from the claim text.