Wafer storage and transport system and method of operation of wafer storage and transport system

A wafer storage and transport system comprising:

• a first ceiling which comprises a first surface, a second surface opposite to the first surface, and an opening;
• a second ceiling which is spaced apart from the first ceiling in a third direction;
• a transport unit which is provided below the second ceiling and is movable in a first direction, the transport unit being configured to transport a Front Opening Unified Pod (FOUP), and the transport unit comprises:
• a pair of horizontal arms extendable in a second direction;
• and
• a vertical arm extendable in the third direction;
• a storage space which is installed on the first surface and configured to store the FOUP such that the FOUP is arranged inside the storage space in the first direction and the second direction, and the FOUP is not arranged in the third direction;
• an interface port installed on the second surface in a region that overlaps the opening in the third direction, and configured to temporarily store the FOUP such that the FOUP is arranged in a line inside the interface port in the first direction;
• and
• an Overhead Hoist Transport (OHT) which is movable along a first traveling rail installed on the second surface,
• wherein the transport unit is installed in a region that overlaps the interface port in the third direction,
• wherein the transport unit is further configured to extend the pair of horizontal arms in the second direction, extend the vertical arm in the third direction to grasp the FOUP arranged in the storage space, and transport the grasped FOUP by extending the vertical arm in the third direction to the interface port,
• wherein the pair of horizontal arms comprises a first arm and a second arm, and a distance between the first arm and the second arm in the first direction narrows, as the first arm and the second arm extend away from a main body of the transport unit in the second direction,
• wherein a diameter of the vertical arm narrows, as the vertical arm extends away from the main body of the transport unit in the third direction, and
• wherein the OHT is configured to transport the FOUP temporarily stored in the interface port to a semiconductor facility.

A method of operating a wafer storage and transport system, the method comprising:

• moving a transport unit along a second traveling rail in a first direction under control of a controller, wherein the transport unit comprises a pair of horizontal arms extendable in a second direction and a vertical arm extendable in a third direction,
• grasping, by the transport unit, a Front Opening Unified Pod (FOUP) stored in storage spaces installed on a first surface of a ceiling and loading the FOUP into an interface port placed between the storage spaces, the FOUP being arranged inside the storage spaces in the first direction and the second direction and not being arranged in the third direction, and the FOUP being arranged in a line inside the interface port in the first direction;
• moving an Overhead Hoist Transport (OHT) to the interface port along a first traveling rail spaced apart from the second traveling rail in the third direction under control of the controller, the first traveling rail being installed on a second surface of the ceiling;
• and
• grasping, by the OHT, the FOUP temporarily stored in the interface port and transporting the FOUP to a semiconductor facility,
• wherein the grasping, by the transport unit, the FOUP stored in the storage spaces comprises extending the pair of horizontal arms in the second direction and extending the vertical arm in the third direction, and
• wherein the loading, by the transport unit, the FOUP into the interface port comprises extending the vertical arm in the third direction.