System for storing wafer and system for monitoring pollution of wafer

A system for monitoring pollution of wafer comprising a database system, an electronic device, and a system for storing wafer;

• the system for storing wafer comprising a wafer box, an installing member, a detection tube, a control unit, and a detection unit, a circulation tube and an air circulation unit;
• the wafer box configured to store the wafer, the wafer box comprising an outlet connector and an inlet connector, the outlet connector and the inlet connector extending a wall of the wafer box from an inner of the wafer box to an outside of the wafer box;
• the installing member covering the wafer box to form a sealed receiving room between the wafer box and the installing member;
• the detection tube received in the sealed receiving room, a first end of the detection tube being coupled to the outlet connector, and a second end of the detection tube being coupled to the inlet connector;
• the control unit coupled to the detection unit, the control unit being outside the wafer box and received in the sealed receiving room, the control unit being configured to output a first control signal to the detection unit;
• the detection unit comprising one or more first sensors, the one or more first sensors being arranged in the detection tube, the one or more first sensors being configured to detect one or more properties of gas in the detection tube to obtain data of an environment where the wafer is stored upon the first control signal;
• the wafer box further defines a through hole, the detection unit further comprises a second sensor and a detection wire, the second sensor is received in the wafer box, the second sensor is coupled to a first end of the detection wire, and a second end of the detection wire extends the through hole to couple to the control unit, the second sensor is an air pressure sensor;
• the wafer box further defines a first circulation passage and a second circulation passage, a first end of the circulation tube is coupled to the first circulation passage, and a second end of the circulation tube is coupled to the second circulation passage;
• the detection unit further comprises a third sensor, the third sensor is fixed in the sealed receiving room, the third sensor is an acceleration sensor;
• the system for storing wafer configured to transmit the data of the environment where the wafer is stored to the database system;
• the database system configured to receive the data of the environment where the wafer is stored from the system for storing wafer;
• the electronic device communicationally coupled to the database system, the electronic device being configured to view and invoke the data of the environment where the wafer is stored remotely.