Capacitive self-sensing for electrostatic transducers with high voltage isolation

Abstract

Transducer systems disclosed herein include self-sensing capabilities. In particular, electrostatic transducers include a low voltage electrode and a high voltage electrode. A low voltage sensing unit is coupled with the low voltage electrode of the electrostatic transducer. The low voltage sensing unit is configured to measure a capacitance of the electrostatic transducer, from which displacement of the electrostatic transducer may be calculated. High voltage drive signals received by the high voltage electrode during actuation may be isolated from the low voltage sensing unit. The isolation may be provided by dielectric material of the electrostatic transducer, a voltage suppression component, and/or a voltage suppression module comprising a low impedance ground path. In the event of an electrical failure of the transducer, the low voltage sensing unit may be isolated from high voltages.

Dependencies are inferred from the claim text.