Light receiving element array having a laminated semiconductor structure and manufacturing method therefor

A light receiving element array comprising:

• a substrate;
• and
• a laminated semiconductor structure that is formed on the substrate;
• wherein:
• the laminated semiconductor structure includes
• a light absorbing layer that is disposed above the substrate, and
• a plurality of window layers of a first conductivity type that are formed apart from each other on the light absorbing layer,
• there is formed, inside the laminated semiconductor structure, for each window layer, a first region of a second conductivity type that extends into the light absorbing layer from a surface of the window layer at an opposite side to the light absorbing layer, and
• there is formed, inside the light absorbing layer, a second region of the second conductivity type that is disposed such as to surround each of the plurality of window layers in plan view and extends from a surface of the light absorbing layer at an opposite side to the substrate toward a surface of the light absorbing layer at a substrate side,
• the light receiving element array includes an insulating film that covers an exposed surface of the light absorbing layer, an exposed surface of the window layers, exposed surfaces of the first region of the second conductivity type and exposed surfaces of the second region of the second conductivity type, and
• a groove extending along the second region of the second conductivity type is formed on an upper surface of the insulating film above the second region of the second conductivity type.