Metal spacer 3D-MIM capacitor
AssigneeInternational Business Machines Corporation
InventorsShravana Kumar Katakam, Ashim Dutta, Chih-Chao Yang
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Abstract
A metal-insulator-metal (MIM) capacitor includes a dielectric layer forming a plane and a capacitor dielectric formed in a pattern having a width parallel to the plane and a height transverse to the plane. Electrodes are formed as sidewall spacers on opposite sides of the width of the capacitor dielectric. Each of the electrodes has a contact to make an electrical connection to the electrode, the contact being disposed within the height.
Claims20
A metal-insulator-metal (MIM) capacitor, comprising:
- a dielectric layer forming a plane, the dielectric layer having capacitor electrodes;
- a capacitor dielectric formed in a pattern having a width parallel to the plane and a height transverse to the plane;
- dielectric electrodes disposed on opposite sides of the width of the capacitor dielectric as sidewall spacers;
- and
- each of the dielectric electrodes having a separate contact to make an electrical connection thereto, the separate contact being disposed within the height.
A metal-insulator-metal (MIM) capacitor, comprising:
- a dielectric layer forming a plane;
- a capacitor dielectric formed in a pattern having a width parallel to the plane and a height transverse to the plane;
- and
- electrodes disposed on opposite sides of the width of the capacitor dielectric as sidewall spacers, the electrodes defining a footprint area of the MIM capacitor based on outer dimensions of the pattern wherein a ratio of electrode area to total footprint area is less than 20%.
A method for forming a metal-insulator-metal (MIM) capacitor, comprising:
- patterning a capacitor dielectric on a plane of dielectric layer in a pattern having a width parallel to the plane and a height transverse to the plane;
- conformally depositing electrode material over the width and height of the pattern;
- etching the electrode material to remove the electrode material from horizontal surfaces, including the width, to form electrodes as sidewall spacers on opposite sides of the width of the capacitor dielectric;
- and
- forming contacts to each of the electrodes to make an electrical connection to each electrode, the contact being disposed within the height.
Dependencies are inferred from the claim text.