Jet impingement cooling devices, systems, and methods

An impingement cooling device for providing cooling fluid to an object, the impingement cooling device comprising:

• a distributor plate including a first side, a second side opposite the first side, a plurality of injection ports extending through the distributor plate from the first side to the second side, and a plurality of extraction ports extending through the distributor plate from the first side to the second side;
• a manifold coupled to the distributor plate and including an inflow volume, an outflow volume, a first inflow opening in fluid communication with the inflow volume and the plurality of injection ports of the distributor plate, a first outflow opening in fluid communication with the outflow volume and the plurality of extraction ports of the distributor plate, and at least one structure separating the inflow volume and the outflow volume on the first side of the distributor plate;
• and
• an impingement target being a separate component from the distributor plate and including a top surface, a bottom surface opposite the top surface, and a plurality of surface features protruding from the top surface, impingement target configured to be coupled to the distributor plate such that the second side of the distributor plate opposes the top surface of the impingement target, wherein the impingement target is configured to be coupled to a heat spreader covering the object via a thermal interface material, wherein the bottom surface of the impingement target has a surface area larger than a top surface of the heat spreader such that the impingement target overhangs at least one side of the heat spreader, so as to provide cooling to the object.