Method for performing a layout of a bulk acoustic wave filter
AssigneeSkyworks Solutions, Inc.
InventorsBenjamin Paul Abbott, Mats Erik Fredriksson, Alexandre Augusto Shirakawa, David Albert Feld, Jiansong Liu
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Abstract
Disclosed herein is a bulk acoustic wave filter comprising a number of acoustic wave resonators, each acoustic wave resonator being encompassed by a polygon including vertices of a mesh optimized to provide a reduced filter size of the bulk acoustic wave filter integrated on a die.
Claims18
A bulk acoustic wave filter comprising:
- a number of acoustic wave resonators, each acoustic wave resonator being encompassed by a polygon including vertices of a mesh optimized to provide a reduced filter size of the bulk acoustic wave filter integrated on a die;
- a signal input via;
- a signal output via;
- and
- at least one common ground via, each of the signal input via, the signal output via, and the at least one common ground via including a via keep-out area surrounded by an associated via keep-out boundary.
A method for performing a filter layout of a bulk acoustic wave filter, the method comprising:
- encompassing each of a number of acoustic wave resonators by a polygon including vertices of a mesh optimized to provide a reduced filter size of the bulk acoustic wave filter integrated on a die;
- and
- forming a signal input via of the bulk acoustic wave filter, a signal output via of the bulk acoustic wave filter, and at least one common ground via of the bulk acoustic wave filter, each of the signal input via, the signal output via, and the at least one common ground via including a via keep-out area surrounded by an associated via keep-out boundary.
A radio frequency filter module comprising a bulk acoustic wave filter including acoustic wave resonators each encompassed by a polygon comprising vertices of a mesh optimized to provide a reduced filter size of the bulk acoustic wave filter integrated on a die, a signal input via, a signal output via, and at least one common ground via, each of the signal input via, the signal output via, and the at least one common ground via including a via keep-out area surrounded by an associated via keep-out boundary.
Dependencies are inferred from the claim text.