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US 12,700,717 B2Granted
Method for producing micro-optics on surface-emitting laser diodes (VCSEL)
AssigneeRobert Bosch GmbH
InventorsJohannes Meyer, Johannes Hofmann, Tobias Wilm
Life of this patent
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Abstract
A method for producing micro-optics on surface-emitting laser diodes. In a wafer-level operation, the micro-optics are preferably positioned directly on the VCSEL's forming, in each instance, a part of a coherent wafer.
Claims15
A method for producing micro-optics on Vertical-Cavity Surface-Emitting Laser (VCSEL) diodes, the method comprising:
- in a wafer-level operation, positioning the micro-optics directly on the VCSEL's, of a wafer.
A method for producing micro-optics on Vertical-Cavity Surface-Emitting Laser (VCSEL) diodes, the method comprising:
- in a wafer-level operation, positioning the micro-optics directly on the VCSEL's of a wafer;
- manufacturing a wafer having a plurality of VCSELS;
- applying an unfunctionalized photopolymer to the wafer having the VCSELS;
- and
- imprinting specific optical functions of the micro-optics assigned, in each instance, to one of the VCSELS of the wafer.
2 more elements
A method for producing micro-optics on Vertical-Cavity Surface-Emitting Laser (VCSEL) diodes, the method comprising:
- in a wafer-level operation, positioning the micro-optics directly on the VCSEL's of a wafer
- wherein the micro-optics form transmission holograms.
Dependencies are inferred from the claim text.