Electrostatic mirror chromatic aberration correctors

A charged particle system, the system comprising:

• a sample holder configured to hold a sample;
• a source configured to emit a charged particle beam towards a sample;
• an electrostatic mirror chromatic aberration (Cc) corrector, the corrector comprising:
• an electrostatic electron mirror comprising an electrostatic multipole, the electrostatic multipole being positioned in a mirror plane of the electrostatic electron mirror;
• and
• wherein the electrostatic electron mirror is positioned within the corrector such that, when the corrector is in use, an electron beam passing through the corrector is not incident on the electrostatic electron mirror along a central mirror axis of the mirror;
• a focusing column configured to direct the charged particle beam to be incident on the sample;
• and
• one or more detectors configured to detect emissions resultant from the charged particle beam being incident on the sample.