Self-centering voltage standoff
AssigneeApplied Materials, Inc.
InventorsAdam M. McLaughlin, Craig R. Chaney
Life of this patent
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AssigneeApplied Materials, Inc.
InventorsAdam M. McLaughlin, Craig R. Chaney
Estimating the term…
An insulator that may be self-centering is disclosed. The insulator includes an alignment feature that allows it to self-center during installation. In some embodiments, the insulator is created with a captive fastener with a specific alignment feature. The internal cavity of the insulator is formed so as to have a corresponding alignment feature. When tightened, the captive fastener is pressed into the alignment feature of the internal cavity, allowing it to self-center. In other embodiments, the mating electrode is also modified to include a corresponding alignment feature. For example, in some embodiments, the alignment feature on the electrode comprises a specially shaped depression, while the insulator has a corresponding protrusion. In other embodiments, the insulator also has a protective shield.
A system for electrically isolating a component, comprising:
An ion implantation system, comprising:
Dependencies are inferred from the claim text.