Double-mask near-field transducer (NFT) and method thereof
AssigneeWestern Digital Technologies, Inc.
InventorSerdar Yavuz
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AssigneeWestern Digital Technologies, Inc.
InventorSerdar Yavuz
Estimating the term…
A double mask process may be used to define layers of a near field transducer (NFT) to enable independent control over each layer. Controlling critical features of the NFT, including the apex width, taper angles, and flare angles is important for achieving desired areal density capabilities (ADC) of heat-assisted magnetic recording (HAMR) devices. By using a first mask to define a first layer of the NFT then a second mask to define a second layer of the NFT, limitations of the single mask NFT definition process may be overcome. For example, the limitation of using the same flare shape for both the first and the second NFT layers. Further, since the apex width of the NFT is defined by a separate mask, further scaling down of the apex width may also be achieved in a double mask NFT definition process.
A magnetic recording head, comprising:
A magnetic recording head, comprising:
A method of defining a near field transducer (NFT) of a magnetic recording head, the method comprising:
Dependencies are inferred from the claim text.