Method for beam interference compensation based on computer vision

A microscopy system for compensating external interference comprising:

• a data storage configured for capturing data obtained from irradiation of a sample for a sampling duration, and a processing component configured for:
• dividing at least representative parts of the sampling duration into time-windows based on whether the interference is an external interference, wherein, for any defined time window, the intermediate image is constructed also from data captured in any of the time intervals of the same length as the defined time-window and separated from the defined window by an integral multiple of a period of a periodic function;
• constructing, for each of the time-windows, an intermediate image;
• and
• detecting a shift between the intermediate images.

A computer program product comprising instructions that, when run on a processing unit of a charged particle beam microscopy system configured to acquire and compensate charged-particle-beam image data, cause the performance of a method for compensating external interference in a charged particle beam microscopy system in the image data, the method comprising:

• capturing data obtained from irradiation of a sample for a sampling duration;
• dividing at least representative parts of the sampling duration into a number of equally long time-windows (N), based on a nature of the external interference;
• constructing an intermediate image for the time-windows of the representative parts;
• detecting a shift between the intermediate images;
• and
• determining a compensation for the shift between the intermediate images.