Determining substrate characteristics by virtual substrate measurement
AssigneeApplied Materials, Inc.
InventorsDheeraj Kumar, Samit Barai, Pardeep Kumar, Sundar Narayanan, Anantha Sethuraman
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AssigneeApplied Materials, Inc.
InventorsDheeraj Kumar, Samit Barai, Pardeep Kumar, Sundar Narayanan, Anantha Sethuraman
Estimating the term…
A method includes receiving feature data defining a plurality of features of a virtual substrate. The method further includes preparing the virtual substrate for display on a graphical user interface (GUI). The method further includes receiving one or more first inputs via the GUI. The one or more first inputs are associated with one or more locations of the virtual substrate. The method further includes defining a three-dimensional measurement probe based on the one or more first inputs. The method further includes outputting a measurement of the measurement probe. The measurement is associated with a characteristic of the virtual substrate measured by the three-dimensional measurement probe.
A method, comprising:
A system, comprising memory and a processing device coupled to the memory, wherein the processing device is to:
A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:
Dependencies are inferred from the claim text.