Mapping metrics between manufacturing systems

A non-transitory computer readable medium having instructions therein or thereon, the instructions, when executed by a computer system, configured to cause the computer system to at least:

• determine an intensity metric for a manufacturing system, the intensity metric determined based on a reflectivity of a location on a substrate and a manufacturing system characteristic;
• determine a mapped intensity metric for a reference system, the reference system configured to represent a plurality of different manufacturing systems, the reference system having a reference system characteristic, the mapped intensity metric determined based on the intensity metric for the manufacturing system, the manufacturing system characteristic, and the reference system characteristic, to mimic determination of the intensity metric for the manufacturing system using the reference system;
• and
• cause physical configuration or control, based on the mapped intensity metric, of a physical manufacturing process involving the manufacturing system or involving the one or more of the plurality of different manufacturing systems, or provide a signal representing, or based on, the mapped intensity metric to a system for use in configuration or control of the process.

A method for determining a mapped intensity metric, the method comprising:

• determining an intensity metric for a manufacturing system, the intensity metric determined based on a reflectivity of a location on a substrate and a manufacturing system characteristic;
• determining a mapped intensity metric for a reference system, the reference system configured to represent a plurality of different manufacturing systems, the reference system having a reference system characteristic, the mapped intensity metric determined based on the intensity metric for the manufacturing system, the manufacturing system characteristic, and the reference system characteristic, to mimic determination of the intensity metric for the manufacturing system using the reference system;
• and
• physically configuring or controlling a physical manufacturing process involving the manufacturing system and/or one or more of the plurality of different manufacturing systems based on the mapped intensity metric, or providing a signal representing, or based on, the mapped intensity metric to a system for use in configuration or control of the process.