Photosensitive resin composition, photosensitive dry film, layered product, and pattern formation method

A photosensitive resin composition comprising of:

• (A) a silicone skeleton-containing polymer;
• (B) a photoacid generator,
• (C) optionally, a crosslinker;
• (D) optionally, a solvent;
• and
• (E) optionally, a quencher;
• wherein the silicone skeleton-containing polymer (A) consisting of:
• repeat units having the formulae (a1), (a3), (a4), (b1), (b3) and (b4), and
• optionally repeat units having the formulae (a2), and (b2):
• wherein R1 to R4 are each independently a C1-C8 monovalent hydrocarbon group, m is an integer of 1 to 600,
• a1 to a4 and b1 to b4 are numbers in the range:
• 0<a1<1,0<a2<1,0<a3<1,0<a4<1,0<b1<1,0<b2<1,0<b3<1,0<b41,0<a1+a2+a3+a4<1,0<b1+b2+b3+b4<1, and a1+a2+a3+a4+b1+b2+b3+b4=1,
• X1 is a divalent group having the formula (X1), X2 is a divalent group having the formula (X2), X3 is a divalent group having the formula (X3), X4 is a divalent group having the formula (X4),
• wherein Z1 is a single bond, methylene group, propane-2,2-diyl group, 1,1,1,3,3,3-hexafluoropropane-2,2-diyl group or fluorene-9,9-diyl group, R11 and R12 are each independently hydrogen or methyl, R13 and R14 are each independently a C1-C4 alkyl group or C1-C4 alkoxy group, p1 and p2 are each independently an integer of 0 to 7, q1 and q2 are each independently an integer of 0 to 2,
• wherein Z2 is a single bond, methylene group, propane-2,2-diyl group, 1,1,1,3,3,3-hexafluoropropane-2,2-diyl group or fluorene-9,9-diyl group, R21 and R22 are each independently hydrogen or methyl, R23 and R24 are each independently a C1-C4 alkyl group or C1-C4 alkoxy group, r1 and r2 are each independently an integer of 0 to 7, s1 and s2 are each independently an integer of 0 to 2,
• wherein R31 and R32 are each independently hydrogen or methyl, t1 and t2 are each independently an integer of 0 to 7,
• wherein R41 and R42 are each independently hydrogen or methyl, R43 and R44 are each independently a C1-C8 monovalent hydrocarbon group, u1 and u2 are each independently an integer of 0 to 7, and v is an integer of 0 to 600,
• wherein the photoacid generator (B) contains (B1) a photoacid generator in the form of an onium salt and (B2) a photoacid generator other than an onium salt.